Electrically Insulating Boron Nitride Heater for Crystal Growth – Low Thermal Expansion

Boron Nitride (BN) Heater Applications

• Vacuum & Heat-Treatment Equipment

  ✅Key Advantages

  1. Precise wafer temperature control within ±3 °C, maintaining in-plane uniformity across 200 mm–300 mm substrates.
  2. Fully compatible with ALD, MBE, and PVD systems used in thin-film, epitaxy, and etching processes.
  3. Ultra-low outgassing (< 10⁻⁸ Torr·L/s·cm²) and non-contaminating CVD-PBN layers ensure cleanroom compliance.
  4. Stable resistance and linear power response up to 1600 °C for repeatable thermal profiling.

  ✅ Problem Solved

  In multi-wafer batch ALD chambers, uneven heat distribution caused yield variation up to 8 %.
  After integrating ADCERAX PBN–PG heaters with optimized resistive zoning, temperature uniformity improved by 30 %, while ramp-up time decreased by 20 %, directly enhancing wafer-to-wafer consistency and process throughput.

• Metallurgical & High-Temperature Processing

  ✅Key Advantages

  1.Operates reliably under rapid ramp rates (> 200 K/s) up to 1600 °C in vacuum or reducing atmospheres.
  2. Excellent resistance to molten metal attack, compatible with reactive alloys and sintering furnaces.
  3. Long operational lifespan through > 1200 thermal cycles, minimizing maintenance frequency.
  4. Superior thermal conductivity (60–120 W/m·K) ensures uniform heating in large crucible or die zones.

  ✅ Problem Solved

  A titanium-alloy sintering plant experienced frequent heater failures (every 200 cycles) due to oxidation and delamination.
  After switching to ADCERAX PBN heaters, stable operation extended beyond 1200 cycles, cutting unplanned downtime by 85 hours per year and reducing heater replacement costs by 40 %.

• Research Laboratories & R&D Institutions

  ✅Key Advantages

  1. Custom geometries adaptable to experimental chambers, beamlines, and high-vacuum rigs.
  2. Stable resistivity and precise controllability enable repeatable temperature ramp curves for material testing.
  3. High dielectric insulation (≥ 1×10¹² Ω·cm) isolates current flow for sensitive in-situ measurements.
  4. Supports integration of multi-zone heating and thermocouples, enabling accurate temperature mapping.

  ✅ Problem Solved

  In a crystal-growth R&D setup, inconsistent heating led to asymmetrical growth and reproducibility issues.
  Customized 4-zone ADCERAX PBN heaters achieved ±2 °C uniformity across the sample stage, enabling reliable experimental repeatability and reducing recalibration frequency by 60 %.

Pyrolytic Boron Nitride Heater Usage Instructions

• Installation

  1. Mount the heater on a flat, rigid, and clean surface to avoid point stress or bending during operation.
  2. Use ceramic or graphite clamps with even pressure; avoid metallic fasteners that cause local heat distortion.
  3. Verify correct alignment of power terminals and thermocouple sensors before connection.
  4. Ensure proper grounding and electrical isolation from surrounding metallic structures.

• Operation

  1. Apply voltage gradually using a programmable power controller to prevent a current surge.
  2. Maintain vacuum or inert gas atmosphere (argon, nitrogen); avoid exposure to air when the temperature exceeds 400 °C, as PG may oxidize.
  3. Monitor surface temperature and resistance; ensure stable power supply and avoid overheating beyond rated limits.
  4. For multi-zone heaters, calibrate each zone independently to maintain in-plane uniformity.

• Storage

  1. Store heaters in a dry, temperature-controlled room (≤ 40 % RH) to prevent moisture absorption.
  2. Keep products in their original anti-static packaging or vacuum-sealed pouches until installation.
  3. Avoid stacking or applying heavy loads on stored heaters.

• Cleaning

  1. Clean the PBN surface with lint-free, alcohol-free wipes to prevent residue buildup.
  2. If contamination occurs, blow with dry nitrogen or use an ultrasonic cleaner under neutral solvent (if specified).
  3. Never scrub or touch the PG edges directly — they are functional electrical layers.

• Common Issues & Solutions

  1. Uneven Heating → Check zone wiring, thermocouple calibration, or contact pressure; confirm zone power balance.
  2. Reduced Insulation → Inspect for surface moisture or contamination; dry in vacuum at 100–150 °C for 2 h if necessary.
  3. Slower Ramp Rate → Verify controller output and inspect the PG resistance; adjust current curve for proper rise time.
  4. Localized Hot Spots → Ensure clamp uniformity and verify chamber pressure balance.
  5. Oxidation Traces → Review process gas purity and reduce air exposure above 400 °C.

Boron Nitride (BN) Heater FAQ

1. Q: What are the typical working conditions required for a boron nitride heater?
   A: Boron nitride heaters are designed for ultra-high vacuum (UHV) or inert gas environments such as argon or nitrogen. They operate stably up to 1600 °C with minimal outgassing and should not be exposed to air at high temperature to avoid oxidation of the PG resistive core.
2. Q: Can the heater be customized for specific chamber geometries or power requirements?
   A: Yes. ADCERAX provides complete customization, including diameter (up to 300 mm), multi-zone layout, terminal orientation, and electrical ratings. Customers can submit drawings and required operating parameters (temperature, voltage, current) for accurate design and quotation.

3. Q: How long is the typical service life of a boron nitride heater?
   A: When used within rated parameters, the heater can exceed 1000–1500 thermal cycles in vacuum applications. Lifespan depends on cycle frequency, environment cleanliness, and electrical load stability.

4. Q: What testing or quality control is performed before delivery?
   A: Every heater undergoes resistance calibration, insulation testing, dimensional inspection, and zone uniformity mapping. Detailed QC data can be provided with batch shipments upon request.

5. Q: How does ADCERAX ensure batch consistency for industrial customers?
   A: ADCERAX uses CVD-fabricated PBN and PG materials with traceable lot control. Each production batch maintains resistance tolerance within ±1.5 % and thickness deviation ≤0.1 mm, ensuring consistent performance for repeat orders.

6. Q: What information should be provided when requesting a bn heater quotation?
   A: Please include:
   a. Working temperature range and atmosphere (vacuum, argon, nitrogen)
   b. Desired dimensions (outer/inner diameter, thickness)
   c. Electrical requirements (voltage, current, power)
   d. Mounting design or drawings (if available)  This allows engineers to confirm the optimal heater design and ensure compatibility with your

What our Clients Say about Boron Nitride Ceramic Heater

• ⭐️⭐️⭐️⭐️⭐️
  We replaced our quartz heaters with ADCERAX boron nitride heaters, and the chamber stability immediately improved. Power control is smoother, and we’ve logged over 1000 cycles without recalibration.
  -- Dr. H. Lutz, Process Development Manager, NanoThin Systems GmbH
• ⭐️⭐️⭐️⭐️⭐️
  Our metallurgical furnace now uses custom PBN–PG–PBN boron nitride heaters. The units handle 1600 °C operation flawlessly, and resistance drift stayed under 1 %. Excellent reliability for production lines.”
  -- James Walker, Operations Engineer, Metallite Components Ltd.
• ⭐️⭐️⭐️⭐️⭐️
  ADCERAX engineered a multi-zone boron nitride heater for our ALD prototype. Temperature mapping showed ±2 °C uniformity across 8-inch wafers — perfect for high-precision film deposition.
  -- Dr. Keiko Arai, Senior Research Scientist, Tokyo Materials Lab
• ⭐️⭐️⭐️⭐️⭐️
  Fast quotation, clear drawings, and precise machining. The boron nitride heater fit our vacuum system with zero adjustment and has been stable through months of continuous operation.
  -- Richard Collins, Procurement Lead, VaporTech Instruments USA