Boron Nitride Insulation Gasket for PVD & Vacuum Coating Systems – Non-Wetting & Electrically Insulating Spacer

Boron Nitride Insulation Gasket Applications

• Vacuum Coating & Surface Engineering Systems

  ✅Key Advantages

  1. Electrically isolates electrodes, fixtures, and targets within the vacuum chamber to prevent short-circuits.
  2. Non-wetting surface minimizes deposition buildup and enables easy cleaning during maintenance.
  3. High dielectric strength (≥3×10⁶ V/m) ensures stable operation even under high-voltage plasma discharge.

  ✅ Problem Solved

  A PVD system builder faced frequent arcing between the cathode and shield rings. After switching to ADCERAX BN insulation gaskets, arcing failures dropped by over 90%, and cleaning downtime was reduced by 40%, improving throughput consistency across coating batches.

• Thermal Processing & Heat-Treatment Equipment

  ✅Key Advantages

  1. Serves as a thermal barrier pad between heating elements and metallic supports, improving temperature uniformity.
  2. Maintains structural integrity under 1800 °C vacuum or inert conditions, with negligible creep or deformation.
  3. Low thermal expansion coefficient (~2 × 10⁻⁶ /K) reduces stress mismatch in multi-material assemblies.

  ✅ Problem Solved

  A heat-treatment furnace manufacturer previously experienced gasket distortion every 80 hours. Using ADCERAX BN insulating pads extended operational life beyond 400 hours, cutting replacement costs by 70% while maintaining furnace calibration accuracy.

• Semiconductor, Quartz, and Glass Fixture Integration

  ✅Key Advantages

  1. Provides mechanical and thermal isolation between quartz, sapphire, and metallic substrates during precision processing.
  2. Non-reactive BN surface prevents sticking and microcracking at elevated temperatures.
  3. Excellent flatness (< 0.03 mm) ensures reliable alignment in high-precision tooling setups.

  ✅ Problem Solved

  A quartz fixture supplier suffered yield loss from substrate edge cracks. After introducing BN interface spacers, product rejection rates fell by 18%, and fixture cleaning frequency decreased by 30%.

BN Insulation Gasket Usage Instructions

• Installation

  1. Verify surface flatness and remove debris, oil, or oxide layers from both contact faces before assembly.
  2. Align the gasket orientation mark according to the designed thermal flow direction.
  3. Tighten bolts or clamps gradually and diagonally to ensure even stress distribution.
  4. For delicate surfaces, use soft copper or graphite interlayers to buffer surface roughness.
  5. Avoid applying localized force or bending torque during installation.

• Operation

  1. Suitable for vacuum and inert atmospheres (N₂, Ar) up to 1800 °C, and up to 1000 °C in mild oxidizing conditions.
  2. Maintain a gradual temperature ramp rate (< 10 °C/min for large parts) to reduce thermal stress.
  3. Compatible with quartz, alumina, graphite, and refractory metals under non-wetting contact.
  4. Avoid mechanical shock during high-temperature operation or rapid cooling.
  5. In plasma or reactive gas systems, consider BN + Y₂O₃ coating for extended oxidation resistance.

• Storage

  1. Store in a dry, dust-free environment with humidity below 60 %.
  2. Keep gaskets in original foam or vacuum-sealed packaging to prevent edge chipping.
  3. Do not stack large-diameter plates directly; insert soft interleaves between each layer.
  4. Avoid contact with water, oil, or acidic vapors that may attack BN grain boundaries.
  5. Label each batch to maintain traceability and avoid mixing of different material grades.

• Cleaning

  1. Remove residues with compressed air, soft brushes, or isopropanol wipes.
  2. For stubborn films, use non-metallic scrapers to avoid surface scratches.
  3. Avoid acidic or alkaline cleaners, ultrasonic cleaning, or steam washing that can degrade BN microstructure.
  4. After cleaning, dry the gasket at 80–100 °C for 1–2 hours before reinstallation to prevent moisture absorption.

• Common User Issues & Solutions

  1. Edge Chipping after Installation
  → Caused by uneven torque or rough contact surfaces.
  Solution: Use torque-controlled tools, polish mating surfaces, or add a compliant interlayer (Cu/graphite).

  2. Color Change after Long Heating
  → Caused by normal BN oxidation to B₂O₃ film above 900–1000 °C.
  Solution: No functional impact below 1000 °C; for repeated high cycles, apply Y₂O₃ topcoat.

  3. Warping or Deformation under Load
  → Due to uneven support or excessive compressive force.
  Solution: Check support flatness; increase part thickness or choose higher-density BN grade.

  4. Contamination or Staining on Contact Surface
  → From metallic vapor or coating residue.
  Solution: Clean gently with alcohol; if severe, resurface by light polishing.

  5. Reduced Insulation after Long-Term Use
  → Possibly from absorbed moisture or fine cracks.
  Solution: Bake at 120 °C for 2 hours to restore resistance; inspect before reuse.

Boron Nitride Insulation Gasket FAQ

1. Q: Can boron nitride insulating spacers be used in oxidizing environments?
   A: Yes, but limited to ≤ 1000 °C in mild oxidation. For prolonged exposure, ADCERAX recommends BN + Y₂O₃ or BN + Si₃N₄ coatings, which extend oxidation life by 3–5× without affecting dielectric strength.
2. Q: What are the electrical insulation properties of BN gaskets?
   A: BN exhibits dielectric strength above 3 × 10⁶ V/m and resistivity > 10¹⁴ Ω·cm at room temperature, ensuring reliable isolation between electrodes and structural parts even under high-voltage or plasma environments.

3. Q: How to determine the correct BN gasket grade for my process?
   A: Grade selection depends on temperature, load, and atmosphere.
   a. HP-BN → high-density for precision fixtures
   b. HBN-R → reinforced for mechanical strength
   c. BN + AlN composite → improved thermal conductivity (30–40 W/m·K) for heat-spreading interfaces

4. Q: What tolerances and surface finishes can ADCERAX achieve?
   A: BN insulation gaskets can be machined to ± 0.05 – 0.10 mm, with flatness ≤ 0.03 mm. Surface finish options include raw, fine-polished, or sand-blasted, depending on required sealing or contact pressure uniformity.
5. Q: How does moisture affect boron nitride insulation gaskets?
   A: BN is slightly hygroscopic. Absorbed moisture may lower resistivity temporarily. Store below 60 % RH, and bake parts at 100 °C for 2 h before use in vacuum or high-voltage systems to restore performance.
6. Q: How long is the typical service life of a BN insulation gasket?
   A: Service life varies by process—typically 300–800 hours in PVD/CVD chambers or > 400 cycles in furnace use. Proper alignment, gradual heating, and periodic cleaning significantly extend lifetime.
7. Q: What makes a boron nitride insulation gasket different from alumina or mica gaskets?
   A: Boron nitride (BN) insulation gaskets differ from alumina and mica types by combining electrical insulation, non-wetting performance, and machinability in one material.
   Below is a comparison of key performance factors commonly evaluated in high-temperature and vacuum applications:
   

   Property	Boron Nitride (BN)	Alumina (Al₂O₃)	Mica
   Maximum Working Temperature	1800 °C (vacuum/inert) / 1000 °C (air)	1650 °C (air)	≤ 600 °C
   Electrical Resistivity	≥ 10¹⁴ Ω·cm — excellent insulator	≥ 10¹³ Ω·cm — strong insulator	Moderate, degrades at > 400 °C
   Thermal Conductivity	20 – 40 W/m·K — good heat spreading	25 – 30 W/m·K — moderate	0.2 – 0.4 W/m·K — poor
   Thermal Expansion (CTE)	2 × 10⁻⁶ /K — matches quartz & metal	8 × 10⁻⁶ /K — higher mismatch	5 – 7 × 10⁻⁶ /K — unstable
   Non-Wetting with Molten Metals	Excellent — resists Al, Cu, Mg adhesion	Poor — easily wets and contaminates	Not resistant to molten metals
   Machinability	High — CNC-machinable to ± 0.05 mm	Low — brittle, needs diamond tools	Very limited
   Vacuum Compatibility	Excellent — no outgassing	Excellent	Moderate — contains bound moisture
   Chemical Stability	Inert to most acids & metals	Stable in air, reactive with strong alkalis	Limited chemical resistance

   Conclusion:
   A boron nitride insulation gasket provides the best balance of high-temperature capability, dielectric strength, and non-wetting performance.
   It is preferred in vacuum coating, heat-treatment, and semiconductor processes where alumina or mica cannot withstand combined electrical and thermal demands.

Boron Nitride Insulation Gasket Reviews

• ⭐️⭐️⭐️⭐️⭐️
  TADCERAX BN insulation gaskets solved our chamber short-circuit issue. Dimensional consistency within ±0.05 mm made installation perfect.
  John Keller – Process Engineer, Thermacoat Inc.
• ⭐️⭐️⭐️⭐️⭐️
  We used custom BN insulation spacers in our CVD tool. Excellent non-wetting behaviour kept targets clean after multiple cycles.
  Mariko Tanaka – R&D Manager, Kyoto Vacuum Systems
• ⭐️⭐️⭐️⭐️⭐️
  Reliable BN insulating washers from ADCERAX arrived safely packed in foam trays. Great factory support and quick engineering feedback.
  David Hernandez – Procurement Lead, SurfaceTech Coatings
• ⭐️⭐️⭐️⭐️⭐️
  We replaced alumina gaskets with BN insulation pads; service life tripled, and energy loss per cycle dropped by 12%.
  Anna Larsen – Quality Supervisor, NordHeat Equipment AB