Alumina ceramic vacuum suction plate featuring a microporous vacuum structure for stable, mark-free holding of wafers, solar cells, thin glass, and miniature electronic parts; pore distribution, working-surface flatness, zoning layout, and optional ESD range are engineered to match process ΔP-flow and positioning accuracy requirements.
Alumina Ceramic Vacuum Suction Plate Benefits
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Uniform vacuum distribution
An interconnected microporous alumina structure distributes negative pressure evenly across the defined effective area, reducing localized pressure peaks and minimizing stress concentration on brittle wafers, solar cells, and thin glass substrates during transfer or inspection. -
Controlled pore size window
Application-specific pore distribution ensures stable ΔP–flow behaviour under defined vacuum setpoints, providing predictable suction force and minimizing sudden pressure fluctuation during ramp-up or high-speed operation. -
High-flatness working surface
Defined flatness across the effective area supports stable backside contact, reduces out-of-plane distortion, and improves repeatability in metrology, alignment, and precision placement processes. -
Zoned vacuum architecture
Independently controlled vacuum regions enable staged activation and center-to-edge stabilization, improving edge support on thin or large-format substrates while reducing lift and vibration. -
Low-particle surface option
Surface finishing strategies (fine-ground or polished Ra targets) reduce particle release during handling and inspection steps, helping maintain cleanliness in post-clean or precision environments. -
ESD-aware configuration
Selectable surface resistivity window or grounding strategy supports electrostatic-sensitive wafer and electronic component processes, reducing the risk of charge accumulation during vacuum holding. -
Dimensional stability under process conditions
Alumina substrate maintains geometric stability under moderate thermal fluctuation and repeated vacuum cycling, ensuring consistent flatness and suction performance across production cycles.
Alumina Ceramic Vacuum Suction Plate Properties
| Property | Unit | 99.5% Al₂O₃ | 99.6% Al₂O₃ | 99.7% Al₂O₃ | 99.8% Al₂O₃ | 99.9% Al₂O₃ | 99.99% Al₂O₃ |
|---|---|---|---|---|---|---|---|
| Alumina content | % | 99.5 | 99.6 | 99.7 | 99.8 | 99.9 | 99.99 |
| Density | g/cm³ | 3.89 | 3.91 | 3.92 | 3.93 | 3.94 | 3.98 |
| Open porosity | % | 0 | – | – | – | – | – |
| Color | – | Ivory | Ivory | Ivory | Ivory | Ivory | Ivory |
| Water absorption | % | – | 0 | 0 | 0 | 0 | 0 |
| Young’s modulus (Elastic modulus) | GPa | 375 | 356 | 357 | 358 | 359 | 362 |
| Shear modulus | GPa | 152 | – | – | – | – | – |
| Bulk modulus | GPa | 228 | – | – | – | – | – |
| Poisson’s ratio | – | 0.22 | – | – | – | – | – |
| Compressive strength | MPa | 2600 | 2552 | 2554 | 2556 | 2558 | 2570 |
| Flexural strength | MPa | 379 | 312 | 313 | 314 | 315 | 320 |
| Fracture toughness | MPa·m¹ᐟ² | 4 | – | – | – | – | – |
| Hardness | GPa | 14.1 (≈1440 kg/mm²) | 23 | 24 | 25 | 26 | 30 |
| Thermal conductivity | W/m·K | 35 | 32–37 | 33–38 | 34–39 | 35–40 | 36–42 |
| Thermal shock resistance ΔT | °C | – | 222 | 223 | 224 | 225 | 228 |
| Maximum use temperature (no load) | °C | ≤1750 | 1755 | 1760 | 1765 | 1770 | 1800 |
| Coefficient of thermal expansion | 10⁻⁶/°C | 8.4 | – | – | – | – | – |
| Specific heat | J/kg·K | 880 | – | – | – | – | – |
| Volume resistivity | Ω·cm | >1×10¹⁴ | >1×10¹⁴ | >1×10¹⁴ | >1×10¹⁴ | >1×10¹⁴ | >1×10¹⁴ |
| Dielectric constant (relative permittivity) | – | 9.8 | 9.83 | 9.84 | 9.85 | 9.86 | 9.92 |
| Dielectric strength | kV/mm | 16.9 | 23.2 | 23.4 | 23.6 | 23.8 | 24 |
| Dissipation factor (loss factor @1 kHz) | – | 0.0002 | – | – | – | – | – |
Alumina Ceramic Vacuum Suction Plate Specifications
Most alumina ceramic vacuum suction plates are manufactured based on specific process requirements rather than fixed standard sizes. Dimensions, pore structure, flatness, zoning layout, and interface details are typically defined by the application and equipment design. Please refer to the customization section below for the full range of parameters you can specify.
| Item No. | Diameter (mm) | Thickness (mm) | Purity |
|---|---|---|---|
| AT-PV-C001 | Customize | Customize | Customize |
Alumina Ceramic Vacuum Suction Plate Packaging
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Cleanroom packaging: wiped, double-bagged, flatness protectors, corner guards
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Accessories: vacuum manifold adapters, O-rings/seals, alignment pins, quick couplers, and inline filters
