Custom Machined High Purity Alumina Deposition Ring with Tight Tolerances for Vacuum Chambers

High Purity Alumina Deposition Rings can be machined in a wide diameter range from small optical coater rings to large industrial chambers, with custom outer/inner diameters, thickness, gas-slot geometry and mounting interfaces produced according to your drawings or verified samples.

Catalogue No. AT-HP-MH01
Material Al₂O₃
Purity  99%-99.99%
Maximum service temperature (air/vacuum) 1,600–1,800 °C
Dielectric strength approx. 17–18 kV/mm
24H Standard Dispatch
Small Batch Support OEM
Factory Direct
Expert Engineering Support

An High purity Alumina Deposition Ring is a high-purity alumina ceramic ring installed inside PVD, CVD or other vacuum coating chambers. It sits around the substrate or at the edge of the process zone and is machined to match the chamber geometry so that it guides process gas flow, defines the coating aperture and shields nearby metal parts from direct deposition.

 

High Purity Alumina Deposition Ring Benefits

  • Process-oriented ring geometry – The Alumina Deposition Ring can be machined so that its cross-section, gas ports, cut-outs and step features follow the original chamber blueprint, including nearby shields and electrodes. This geometry match helps keep gas residence time, plasma boundary and coating aperture consistent after every replacement, which means less process re-tuning and more repeatable coating profiles over long production campaigns.

  • High-temperature stability – The alumina body keeps its shape and electrical insulation over repeated deposition and cleaning cycles within the typical alumina use range, so ring flatness and fit do not drift when the chamber is ramped up and down. This allows the ring to stay aligned with fixtures and substrates, reducing mechanical stress on clamps and seals and supporting stable film properties run after run.

  • Low particle and erosion behaviour – The dense, fine-grained alumina used for the deposition ring has high hardness and wear resistance compared with common refractory linings, so it is less prone to edge chipping and surface erosion in the coating zone. Combined with controlled chamfers and appropriate surface finishing, this helps limit loose particles inside the chamber and supports lower defect density on coated parts.

  • Electrical insulation in high-voltage environments – Alumina’s high dielectric strength allows the Alumina Deposition Ring to sit close to bias electrodes, powered targets or feedthroughs while maintaining the isolation gap to grounded metal parts. This reduces the risk of surface tracking and arc paths around the ring, giving process engineers more margin when setting bias voltage, power levels and pulse parameters.

  • Compatibility with vacuum and reactive gases – The Alumina Deposition Ring resists attack from typical process gases and vapours used in metal and dielectric film deposition, as well as from many acid or alkaline solutions used during chamber cleaning. Because the ceramic is chemically inert and contains no metallic binders, it contributes little contamination to the chamber environment, helping to keep film composition and optical or electrical properties within the specified window.

High Purity Alumina Ceramic Deposition Ring Properties

Property Unit 99.5% Al₂O₃ 99.6% Al₂O₃ 99.7% Al₂O₃ 99.8% Al₂O₃ 99.9% Al₂O₃ 99.99% Al₂O₃
Alumina content % 99.5 99.6 99.7 99.8 99.9 99.99
Density g/cm³ 3.89 3.91 3.92 3.93 3.94 3.98
Open porosity % 0
Color Ivory Ivory Ivory Ivory Ivory Ivory
Water absorption % 0 0 0 0 0
Young’s modulus (Elastic modulus) GPa 375 356 357 358 359 362
Shear modulus GPa 152
Bulk modulus GPa 228
Poisson’s ratio 0.22
Compressive strength MPa 2600 2552 2554 2556 2558 2570
Flexural strength MPa 379 312 313 314 315 320
Fracture toughness MPa·m¹ᐟ² 4
Hardness GPa 14.1 (≈1440 kg/mm²) 23 24 25 26 30
Thermal conductivity W/m·K 35 32–37 33–38 34–39 35–40 36–42
Thermal shock resistance ΔT °C 222 223 224 225 228
Maximum use temperature (no load) °C ≤1750 1755 1760 1765 1770 1800
Coefficient of thermal expansion 10⁻⁶/°C 8.4
Specific heat J/kg·K 880
Volume resistivity Ω·cm >1×10¹⁴ >1×10¹⁴ >1×10¹⁴ >1×10¹⁴ >1×10¹⁴ >1×10¹⁴
Dielectric constant (relative permittivity) 9.8 9.83 9.84 9.85 9.86 9.92
Dielectric strength kV/mm 16.9 23.2 23.4 23.6 23.8 24
Dissipation factor (loss factor @ 1 kHz) 0.0002

 

High Purity Alumina Ceramic Deposition Ring Specifications

Alumina Deposition Ring
Item No. Diameter (mm) Thickness (mm)
AT-HP-MH01 Customize

 

High Purity Alumina Deposition Ring Packaging

  • Each Alumina Deposition Ring is wrapped with soft contact protection around the sealing and locating surfaces to reduce edge chipping during transport.

Alumina Deposition Ring Packaging

Application Scenarios — High Purity Alumina Deposition Ring

  • PVD /CVD Vacuum Coating Equipment Manufacturers(OEM)

    ✅Key Advantages

    1. Geometry-matched deposition ring – Custom alumina ring profiles follow the chamber wall and electrode layout, helping maintain the designed gas residence time and plasma distribution across the coating zone.

    2. Thermally stable support – Rings operate within the 1,400–1,800 °C service band typical for alumina ceramics, so OEMs can design for repeated high-temperature cycles without dimensional drift.

    3. Electrical and chemical robustness – High dielectric strength and chemical resistance allow the same Alumina Deposition Ring design to be used in different coating recipes and chamber configurations.

    ✅ Problem Solved

    An equipment builder designing a new PVD line for industrial tools needs a deposition ring that keeps chamber dimensions stable over long campaigns. By switching from mixed refractory parts to a single high-purity Alumina Deposition Ring, the OEM can run higher power density without losing insulation margin, taking advantage of alumina’s 17–18 kV/mm dielectric strength and high-temperature rating. This reduces re-qualification work between batches and simplifies the spare-parts list for end-users.

  • Coating Job Shops for Cutting Tools, Molds and Components

    ✅Key Advantages

    1. Stable ring for continuous production – Alumina Deposition Rings tolerate frequent thermal cycling while maintaining surface integrity, supporting long runs of tool and component batches.

    2. Lower particle-related rejects – The dense ceramic structure resists erosion and chipping, helping coater operators keep defect counts under control during campaigns.

    3. Predictable replacement intervals – Defined material limits and inspection criteria make it easier to plan preventive replacement before coating quality drifts.

    ✅ Problem Solved

    A coating job shop running multi-shift production finds that inconsistent chamber rings cause unplanned stops and extra rework on coated tools. Industry studies show that an hour of downtime in manufacturing can cost around 260,000 USD, so unplanned chamber maintenance has a direct profit impact. By standardising on Alumina Deposition Rings with defined inspection limits and planned change-out windows, the shop can schedule maintenance during planned gaps instead of reacting to failures.

  • Optical and Functional Thin-Film Coating Lines

    ✅Key Advantages

    1. Support for precise film uniformity – Alumina Deposition Rings help define the coating aperture and edge conditions for lenses, filters and display substrates, supporting repeatable thickness profiles.

    2. Clean, inert boundary – High-purity alumina does not out-gas or contaminate optical films when used within its temperature range, which is important for multilayer stacks.

    3. Compatibility with cleaning processes – The ring withstands typical chamber cleaning chemistries and thermal schedules, simplifying maintenance.

    ✅ Problem Solved

    An optical coater supplying anti-reflection and mirror stacks needs tight batch-to-batch repeatability. The previous mixed-material ring design produced fine particles and edge flakes after several campaigns, which showed up as coating defects. By replacing the original design with a single-piece Alumina Deposition Ring machined to match the optical aperture, the coater can extend cleaning intervals while keeping defect density inside the tolerance window.

User Guide — High Purity Alumina Deposition Ring

  • Installation

    1. Verify the Alumina Deposition Ring part number and orientation before installation, matching the drawing and chamber position.
    2. Handle the ring with two hands or dedicated supports, avoiding point loads on thin sections and inner edges.
    3. Clean the seating surfaces on the chamber and check for burrs or trapped particles before placing the ring.
    4. Tighten clamps or fasteners gradually in a cross pattern so the ring is seated evenly without bending.

  • Use in Operation

    1. Operate the chamber within the alumina temperature range and pressure limits defined for your process recipe.
    2. Avoid rapid temperature steps that exceed the typical thermal shock capability of alumina(commonly around 200 °C instant ΔT for dense grades), unless the process has been validated.
    3. Monitor the ring visually during planned maintenance for cracks, chips or abnormal discolouration near high-energy regions.

  • Storage

    1. Store spare Alumina Deposition Rings in original packaging or padded shelves, protected from impact and contact with metal edges.
    2. Keep storage areas dry and clean; avoid stacking loose rings without separators to prevent edge damage.

  • Common misuse points and how to avoid them

    1. Over-tightening clamps on a cold ring

    Problem: Local stress causes micro-cracks that only show up after several hot cycles.
    Solution: Use torque values consistent with the chamber design and tighten gradually in a cross pattern.

    2. Hard contact with metal tools during maintenance

    Problem: Impacts or prying with screwdrivers chip the inner edges of the Alumina Deposition Ring.
    Solution: Use dedicated lifting fixtures and non-metallic levers; avoid contact between sharp tools and ceramic edges.

    3. Running beyond material temperature limits

    Problem: Process modifications raise power and temperature without checking the alumina design margin, shortening ring life.
    Solution: Review the alumina maximum service temperature and temperature gradients when changing recipes, and adjust cooling or ramp profiles as needed.

High Purity Alumina Deposition Ring FAQ

  1. Q: What is an Alumina Deposition Ring in a vacuum coating chamber?
    A: An Alumina Deposition Ring is a high-purity alumina ceramic ring that sits near the coating zone and shapes gas flow, shields chamber walls and provides electrical insulation during PVD or CVD deposition.
  2. Q: Why choose an Alumina Deposition Ring instead of a metal ring?
    A: The Alumina Deposition Ring offers electrical insulation, better chemical resistance to reactive gases and cleaning chemistries, and reduced particle generation compared with many metallic shields at high temperature.
  3. Q: What temperature range can an Alumina Deposition Ring withstand?
    A: High-purity alumina used in an Alumina Deposition Ring typically works in the 1,600–1,700 °C range in air or vacuum, within the broader 1,400–1,800 °C service interval reported for alumina ceramics.
  4. Q: How precise can the dimensions of a custom Alumina Deposition Ring be?
    A: For critical locating surfaces, it is realistic to specify tolerances in the ±0.05–0.10 mm range for many ring sizes, with flatness and run-out defined according to your chamber design and inspection method.
  5. Q: How often should an Alumina Deposition Ring be replaced?
    A: Replacement intervals depend on power level, chemistry and cleaning method, but many users align ring replacement with planned maintenance cycles to avoid unplanned downtime, which can cost manufacturers on the order of hundreds of thousands of dollars per hour.
  6. Q: Is the Alumina Deposition Ring compatible with standard chamber cleaning processes?
    A: High-purity alumina is resistant to many acids, alkalis and hot gases, so it usually works with standard vacuum chamber cleaning chemistries when the solution and temperature remain within alumina’s chemical compatibility envelope.

Customer Reviews about High Purity Alumina Deposition Ring

  • ⭐️⭐️⭐️⭐️⭐️
    We switched one of our coaters to an Alumina Deposition Ring from ADCERAX. The ring matches our original profile, and we have seen fewer particles on cutting tools over several campaigns.
    -- James R., Maintenance Manager – VectorCoat Tools Ltd.
  • ⭐️⭐️⭐️⭐️⭐️
    Our optical coating line uses custom Alumina Deposition Rings with precise gas slots. ADCERAX worked from our drawings and samples, and the rings installed without any fit issues.
    -- Elena M., Engineering Director – OptiFilm Systems
  • ⭐️⭐️⭐️⭐️⭐️
    For us the key was finding a ceramic supplier and factory that understood vacuum coating hardware. ADCERAX as a direct alumina ceramic manufacturer gave clear drawings and stable pricing for our deposition ring program.
    -- Michael K., Procurement Lead – Nordic Surface Engineering
  • ⭐️⭐️⭐️⭐️⭐️
    We ordered a small batch of modified alumina deposition rings to adapt an older chamber to a new process. The dimensions were accurate, and the custom ring helped us stabilise the new recipe without extra mechanical changes.
    -- Daniel H., Process Engineer – BrightArc Coating Services
customize size

Custom High Purity Alumina Deposition Ring

ADCERAX manufactures Alumina Deposition Rings to customer specifications, using CNC machining and inspection to match chamber geometry and process requirements for vacuum deposition equipment.

1. Geometry & size

  • Outer diameter, inner diameter and thickness, with defined tolerances on all fit and sealing surfaces.

  • Step heights, shoulders and recesses to match shields, electrodes and chamber walls.

  • Flat, L-shaped, T-shaped, stepped or multi-level ring profiles for different chamber layouts.

  • One-piece or split-ring construction to simplify installation in tight chambers.

2. Gas-flow and process features

  • Radial gas slots, circumferential grooves or spiral channels to control local gas distribution.

  • Through-holes, manifolds and multi-channel paths for dual-gas or multi-gas injection designs.

  • Protected regions or sacrificial lips where coating build-up is concentrated and easier to clean.

3. Mounting and interface details

  • Bolt holes, counterbores and countersinks positioned to match existing metal hardware.

  • Keyways, notches, location pins and dowel seats for repeatable positioning in the chamber.

  • Contact pads and standoffs that set the exact gap to substrates, shields or electrodes.

4. Material, surface and inspection

  • Choice of alumina grade(for example standard 99.5 % or higher purity for demanding chemistries).

  • Surface condition: as-fired, ground, lapped or polished on selected faces for sealing or cleanliness.

  • Edge treatment: defined chamfers or radii on ring ID/OD to reduce chipping and particle generation.

  • Agreed inspection items such as flatness, run-out and key dimension reports with each batch.

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