Porous alumina vacuum chuck is a precision holding platform made from sintered alumina ceramic with a uniformly porous surface. Instead of relying on discrete suction holes, the entire surface is filled with micro-pores (typically 5–30 µm in diameter), which allows vacuum pressure to be distributed evenly across the working area.
Porous Alumina Vacuum Chuck Benefits
- Uniform vacuum distribution — Full-area porosity minimizes localized pressure peaks and reduces visible suction artifacts on fragile substrates.
- Zoned vacuum control — Manifold channels allow segment activation for coupons, windows, and step-and-repeat processes without tooling changes.
- Optical surface options — White/black alumina and low-Ra finishes support back-lighting, glare control, and stable edge detection.
- Integrated datum features — Alignment pins, fiducials, countersinks, and reliefs improve placement repeatability and handling safety.
- Clean-usage orientation — Dense ceramic matrix and compatible cleaning methods support low particle generation compared with soft porous polymers.
Porous Alumina Vacuum Chuck Properties
| Property | Unit | 99.7% Al₂O₃ | 99.5% Al₂O₃ | 99% Al₂O₃ | 96% Al₂O₃ |
| Color | Ivory White | Ivory White | Ivory White | Ivory White | |
| Density | g/cm³ | 3.94 | 3.9 | 3.83 | 3.6-3.75 |
| Water Absorption | % | 0 | 0 | 0 | 0 |
| Hardness | Mohs Hardness | 9.1 | 9 | 9 | 8.8 |
| Flexural Strength (20°C) | Mpa | 330 | 320 | 300 | 260 |
| Compressive Strength (20°C) | Mpa | 2300 | 2300 | 2210 | 1910 |
| Maximum Operating Temperature | °C | 1730 | 1700 | 1680 | 1450 |
| Thermal Expansion Coefficient(25°C to 800°C) | 10⁻⁶/°C | 7.6 | 7.6 | 7.6 | 7.6 |
| Thermal Conductivity (25°C) | W/(m·K) | 29 | 27 | 24 | 22 |
| Dielectric Strength (5mm thickness) | AC-kv/mm | 22 | 21 | 19 | 15 |
| Dielectric Loss at 25°C@1MHz | --- | < 0.0001 | < 0.0001 | 0.0003 | 0.0004 |
| Dielectric Constant at 25°C@1MHz | --- | 9.8 | 9.7 | 9.5 | 9.2 |
| Volume Resistivity (20°C) | Ω·cm³ | >10¹⁴ | >10¹⁴ | >10¹⁴ | >10¹⁴ |
| Volume Resistivity (300°C) | Ω·cm³ | 2*10¹² | 2*10¹² | 4*10¹¹ | 2*10¹¹ |
Porous Alumina Vacuum Chuck Specifications
Type 1: Square Microporous Alumina Vacuum Chuck

| Square Microporous Alumina Vacuum Chuck | ||||
| Item NO. | Length (mm) | Width (mm) | Thickness (mm) | Material |
| AT-YHL-XP001 | 305 | 305 | 14 | 316 stainless steel + microporous ceramic (brown) |
| AT-YHL-XP002 | 305 | 305 | 14 | 316 stainless steel + microporous ceramic (brown) |
| AT-YHL-XP003 | 420 | 275 | 20 | Aluminum alloy + microporous ceramic |
| AT-YHL-XP004 | 450 | 200 | 20 | SKD61 + porous ceramic |
| AT-YHL-XP005 | 520 | 520 | 20 | Aluminum alloy + microporous ceramic |
Type 2: Round Microporous Alumina Vacuum Chuck

| Round Microporous Alumina Vacuum Chuck | |||
| Item NO. | Diameter (mm) | Thickness (mm) | Material |
| AT-YHL-XP006 | 174 | 10 | 316 stainless steel + microporous ceramic |
| AT-YHL-XP007 | 220 | 35 | Only alumina ceramic |
| AT-YHL-XP008 | 230 | 16 | 316 stainless steel + microporous ceramic |
| AT-YHL-XP009 | 239 | 12 | Aluminum alloy + microporous ceramic |
| AT-YHL-XP010 | 240 | 12 | 316 stainless steel + microporous ceramic |
| AT-YHL-XP011 | 286 | 20 | Only alumina ceramic |
| AT-YHL-XP012 | 320 | 16 | 316 stainless steel + microporous ceramic |
| AT-YHL-XP013 | 325 | 12 | Aluminum alloy + microporous ceramic |
Porous Alumina Vacuum Chuck Packaging
- Clean pack:Vacuum wrap → anti-shock foam → rigid carton;







