High Strength Silicon Nitride Substrate for SiC Power Modules

ADCERAX supplies high-strength Si₃N₄ ceramic substrates for AMB/DBC power modules, SiC and IGBT packages, EV inverters, industrial drives and high-reliability thermal cycling assemblies. Standard and custom blanks can be produced with controlled thickness, flatness, edge finish, hole/slot features and metallization-ready surfaces according to customer drawings.

Catalogue No. AT-DHG-JB001
Material High-strength silicon nitride ceramic, Si₃N₄
Thermal Conductivity By grade: 80–100 W/m·K (high-TC); 20–25 W/m·K (standard).
Mechanical Strength ≥600 MPa for thermal cycling and copper stress resistance
Custom Options Thickness, flatness, holes, slots, chamfers and metallization-ready surfaces
Engineering RFQ Review
Small-Batch Custom Support
Factory-Direct Manufacturing
Drawing & Process Review

A high-strength silicon nitride substrate is an electrically insulating ceramic base used under copper metallization in SiC and IGBT power modules. It is selected when the module needs better thermal-cycling reliability, lower crack risk and stronger mechanical support than conventional alumina or aluminum nitride substrates.

Why Choose Si₃N₄ for Power Module Substrates?

Silicon nitride is selected when a power module substrate must balance thermal transfer, electrical insulation and mechanical reliability. Compared with alumina, Si₃N₄ provides higher thermal conductivity and fracture toughness. Compared with aluminum nitride, it is often selected where thermal cycling, vibration, copper stress and edge cracking are major reliability concerns.

Material Main Advantage Limitation Best-Fit Use
Alumina Cost-effective and widely available Lower thermal conductivity and lower toughness Standard power circuits and cost-sensitive insulation
Aluminum Nitride Very high thermal conductivity More brittle under mechanical or thermal stress Heat-spreading designs with controlled stress
Silicon Nitride High toughness, good thermal conductivity and low CTE Higher cost than alumina SiC/IGBT modules, EV inverters and thermal-cycling assemblies

High Strength Silicon Nitride Substrate Benefits

  • High bending strength resists cracking under reflow and thermal cycling
    Flexural strength above 600 MPa helps reduce substrate cracking risk during soldering and −40 °C to 150 °C cycling. This reduces die attach failures and supports long-term reliability evaluation in power modules.
  • 75–90 W/m·K thermal conductivity enables compact and cooler module design
    Efficient heat transfer lowers junction-to-case resistance and supports high power density layouts. It supports more stable thermal paths in SiC and IGBT devices.
  • Dielectric strength ≥15 kV/mm supports thinner insulation and high-voltage safety
    High insulation capability allows reduced substrate thickness without compromising creepage and clearance. Suitable for 800V EV systems, PV inverters, and industrial drives.
  • Low CTE close to SiC minimizes thermal stress on copper and die interfaces
    With 2.9–3.2 × 10⁻⁶/K, the CTE matches semiconductor and metallization layers. This reduces solder fatigue, delamination, and warpage under rapid heating and cooling.
  • Precise flatness and thickness tolerance enhance metallization and solder bonding
    Tight control of thickness (±0.05–0.10 mm) helps improve copper wetting consistency and brazing quality. It stabilizes thermal performance and helps reduce assembly variation when process conditions are controlled.

High Strength Silicon Nitride Substrate Properties

Si3N4 Type Gas pressure sintering Si3N4 Hot pressing sintering Si3N4 High thermal conductivity Si3N4
Density (g/cm3) 3.2 3.3 3.25
Flexural Strength (MPa) 700 900 600~800
Young Modulus (GPa) 300 300 300~320
Poisson's ratio 0.25 0.28 0.25
Compressive strength (MPa) 2500 3000 2500
Hardness (GPa) 15 16 15
Fracture toughness (MPa*m1/2) 5~7 6~8 6~7
Maximum working temperature (℃) 1100 1300 1100
Thermal conductivity (W/m*K) 20 25 80~100
Thermal expansion coefficient (/℃) 3*10-6 3.1*10-6 3*10-6
Thermal shock resistance (ΔT ℃) 550 800 /

High Strength Silicon Nitride Substrate Specifications

Type 1: Rectangular High Strength Silicon Nitride Substrate

Si3N4 Substrate in EV Inverter Application

Rectangular Silicon Nitride Substrate
Item No. Length(mm) Width (mm) Thickness (mm)
AT-DHG-JB001 10 10 0.32
AT-DHG-JB002 20 20 0.32
AT-DHG-JB003 30 30 4.0 
AT-DHG-JB004 40 40 0.5
AT-DHG-JB005 50 50 0.32
AT-DHG-JB006 50 50 0.635
AT-DHG-JB007 50 50 1.0 
AT-DHG-JB008 50 50 2.0 
AT-DHG-JB009 50 50 4.0 
AT-DHG-JB010 50 50 9.0 
AT-DHG-JB011 100 100 0.32
AT-DHG-JB012 100 100 0.5
AT-DHG-JB013 100 100 0.635
AT-DHG-JB014 100 100 1.0 
AT-DHG-JB015 100 100 4.0 
AT-DHG-JB016 100 100 9.0 
AT-DHG-JB017 114 114 0.32
AT-DHG-JB018 114 114 0.5
AT-DHG-JB019 114 114 0.635
AT-DHG-JB020 114 114 1.0 
AT-DHG-JB021 190 138 0.32
AT-DHG-JB022 190 138 0.5
AT-DHG-JB023 190 138 0.635
AT-DHG-JB024 190 138 1.0 

Type 2: Round High Strength Silicon Nitride Substrate

Metallized Si3N4 Substrate

Round Silicon Nitride Substrate
Item No. Diameter(mm) Thickness (mm)
AT-DHG-JB025 5 0.25
AT-DHG-JB026 5 0.32
AT-DHG-JB027 5 0.625
AT-DHG-JB028 5 1
AT-DHG-JB029 10 0.25
AT-DHG-JB030 10 0.32
AT-DHG-JB031 10 0.625
AT-DHG-JB032 10 1
AT-DHG-JB033 20 0.25
AT-DHG-JB034 20 0.32
AT-DHG-JB035 20 0.625
AT-DHG-JB036 20 1
AT-DHG-JB037 40 0.25
AT-DHG-JB038 40 0.32
AT-DHG-JB039 40 0.625
AT-DHG-JB040 40 1
AT-DHG-JB041 50 0.25
AT-DHG-JB042 50 0.32
AT-DHG-JB043 50 0.625
AT-DHG-JB044 50 1
AT-DHG-JB045 100 0.32
AT-DHG-JB046 100 1
AT-DHG-JB047 100 2
AT-DHG-JB048 150 0.32
AT-DHG-JB049 150 1
AT-DHG-JB050 150 2
AT-DHG-JB051 150 20

AMB/DBC Design Review Checklist

Before quotation, ADCERAX reviews the substrate drawing, copper layout and assembly conditions to reduce warpage, cracking and bonding risk. The following details help our team evaluate whether a standard substrate, custom blank or metallized substrate preparation is more suitable.

Specification What to Provide Why It Matters
Substrate size Length, width, diameter or panel outline Confirms forming, cutting and inspection feasibility
Thickness Ceramic thickness and tolerance Affects insulation, thermal resistance and warpage
Copper layout Copper thickness, symmetry and isolation gap Reduces stress concentration and bonding risk
Flatness target Bow or warpage limit after processing Supports soldering, brazing and module assembly
Edge requirement Chamfer, radius, bevel or deburring Reduces edge chipping during handling
Surface finish Bare, lapped, polished, Ni/Au, Ag or copper-ready Supports solder wetting, wire bonding or metallization
Hole/slot features Position, diameter, tolerance and datum Helps avoid stress concentration and alignment errors

High Strength Silicon Nitride Substrate Packaging

  • Each substrate is sealed in anti-static film
  • Packed in foam-lined hard cartons to prevent breakage

High Strength Silicon Nitride Substrate Packaging

Where High-Strength Si₃N₄ Substrates Add Value

High-strength Si₃N₄ substrates are designed for power-electronics applications where copper-layer stress, repeated thermal cycling, electrical insulation and module reliability are more important than minimum ceramic cost.

  • SiC and IGBT Power Modules

    Best suited for: High-power-density modules with heavy copper, repeated power cycling and strict flatness or warpage requirements.
    High fracture toughness and low CTE help the ceramic resist cracking and manage thermal-mismatch stress across copper, solder and semiconductor interfaces. Substrate thickness, copper layout, edge clearance and warpage targets should be reviewed together.

  • EV Traction Inverters, OBC and DC/DC Converters

    Best suited for: Compact SiC and IGBT module assemblies exposed to frequent temperature changes, vibration and high electrical loads.
    Si₃N₄ provides an electrically insulating and mechanically robust base beneath the copper structure. It is commonly considered when thermal-cycling resistance and crack control carry more weight than ceramic cost alone.

  • Industrial Drives and Renewable-Energy Converters

    Best suited for: Motor drives, servo systems, solar inverters, wind-power converters and energy-storage power modules operating under repeated load changes.
    The combination of electrical insulation, heat transfer and mechanical toughness supports stable module construction. Custom outlines, holes, slots, surface conditions and metallization-ready requirements can be reviewed against the module drawing.

  • Rail-Traction and High-Reliability Power Conversion

    Best suited for: Power modules that require controlled geometry, traceability and project-specific reliability testing.
    Si₃N₄ substrates can be reviewed for applications involving repeated thermal and mechanical loading. Required standards, inspection records, thermal-cycling conditions and acceptance criteria should be included in the RFQ.

High Strength Silicon Nitride Substrate Usage Instructions

  • Installation & Handling

    1. Inspect substrates for flatness, surface defects, or edge chipping before mounting; measure critical thickness or Ra values at specified datum points if required by process control.
    2. Use vacuum tweezers or soft-tipped ceramic tools when handling; avoid metal tweezers to prevent micro-cracks along the edges.
    3. For AMB/DBC parts, keep copper surface free of oxidation — unpack only before screen printing, soldering, or bonding.

  • Assembly & Operation

    1. Solder/Die attach process:
    a. Follow reflow profile within the agreed-upon qualified ramp-up rate to prevent thermal shock.
    b. Maintain uniform paste thickness or solder preform pressure to avoid voiding and uneven wetting.

    2. Wire bonding/Ni/Au surfaces:
    a. Clean surface with dry nitrogen or ion-free wipes; control ultrasonic energy to avoid surface dents.
    b. Aluminum or gold wires should be bonded after verifying finish thickness and hardness.

    3. Power cycling:
    a. Ensure even copper distribution to limit stress concentration.
    b. Substrate must be supported by a flat heat sink or fixture to minimize bending loads during operation.

  • Storage & Shelf Life

    1. Store in original vacuum-sealed antistatic bags; recommended environment clean, dry, room-temperature environment.
    2. Avoid stacking heavy components directly on substrates; store horizontally in plastic or foam trays.
    3. Copper-clad or Ag/Ni-Au finished substrates should be within the approved shelf-life window to minimize oxidation and bonding quality loss.

  • Cleaning & Maintenance

    1. For bare Si₃N₄ surfaces: use ion-free water or ethanol-based cleaning; avoid abrasive pads to protect Ra tolerance.
    2. For Ni/Au or Ag surfaces: use lint-free cloth with filtered IPA; do not use alkaline detergents, acids, or ultrasonic cleaning unless verified on samples.
    3. Dry with nitrogen or filtered hot air (≤80 °C) to prevent watermarks or ionic contamination before soldering or bonding.

  • Common Misuse & Solutions

    Issue Cause Recommended Action
    Warpage after solder reflow Asymmetric copper layout, rapid cooling Use symmetric stack-up, controlled cooling profile, use fixture support
    Poor solder wetting Oxidized copper/Ni-Au, high Ra or contamination Micro-clean surface, adjust flux, verify finish age
    Crack or edge chipping Metal tweezers, uneven clamping Use soft fixtures, avoid point loads, and apply even clamp pressure
    Bond lift or delamination Under-thickness Au/Ni, over-ultrasonic power Check metallization report, optimize the bonding profile
    Ionic residue or dendrite growth Improper cleaning/flux residue Rinse and bake post-solder, verify ionic contamination level

High Strength Silicon Nitride (Si3N4) Substrate FAQ

  1. Q: What is a high strength silicon nitride substrate used for in power modules?
    A: A high strength Si3N4 substrate provides electrical insulation and mechanical support beneath copper structures in SiC and IGBT power modules. Its toughness and low CTE help manage cracking and warpage risks during soldering and repeated thermal cycling.
  2. Q: Why choose Si3N4 instead of alumina or aluminum nitride?
    A: Alumina is commonly selected for cost-sensitive designs, while aluminum nitride is preferred when very high thermal conductivity is the main requirement. Si3N4 is often chosen when fracture toughness, crack resistance and thermal-cycling reliability are equally important.
  3. Q: What is the thermal conductivity of a Si3N4 substrate?
    A: Thermal conductivity depends on the material grade. High-thermal-conductivity grades typically reach 80–100 W/m·K, while standard grades are typically 20–25 W/m·K.
  4. Q: How does the low CTE of Si3N4 benefit SiC power modules?
    A: Si3N4 typically has a CTE of approximately 2.6–3.3 × 10⁻⁶/K. This helps limit thermal-mismatch stress across the ceramic, copper, solder and semiconductor interfaces during repeated heating and cooling.
  5. Q: How is Si3N4 used with AMB, and is it the same as DBC?
    A: Si3N4 is commonly paired with active metal brazing to bond copper to the ceramic for power-module substrates. DBC is a different bonding route and should not be treated as interchangeable with AMB without reviewing the ceramic, copper stack and downstream process.
  6. Q: What copper thicknesses and surface conditions can be reviewed?
    A: Typical AMB copper-thickness discussions range from approximately 0.3 to 0.8 mm, depending on the layout and process. Requirements may include bare, lapped or polished ceramic, raw copper, Ni/Au or Ag finishes, subject to drawing and process review.
  7. Q: Are standard sizes and custom Si3N4 substrates available?
    A: Common ceramic thickness examples include 0.25, 0.32, 0.63 and 1.0 mm. Square, rectangular, round and custom substrates with holes, slots, chamfers or special outlines can be reviewed according to the required grade, dimensions and quantity.
  8. Q: What information is needed for a Si3N4 substrate quotation?
    A: Provide the drawing revision, substrate dimensions, thickness, tolerances, flatness or warpage limit, edge and hole features, surface condition, copper requirements, module type, voltage conditions, thermal-cycling target and order quantity.
  9. Q: What can cause warpage, cracking or delamination in a power substrate?
    A: Common factors include asymmetric copper patterns, excessive copper thickness, unsuitable thermal profiles, uneven clamping, edge damage, surface contamination and uncontrolled bonding conditions. These factors should be reviewed together with the substrate geometry and acceptance criteria.
  10. Q: Can ADCERAX evaluate Si3N4 substrates for automotive qualification or second-source use?
    A: ADCERAX can review an existing specification or drawing as a candidate for customer evaluation. Automotive approval, second-source qualification and interchangeability depend on the customer’s validation process and are not assumed before testing.
customize size

Customize High Strength Silicon Nitride Substrate

Our silicon nitride substrates can be manufactured and post-processed according to customer drawings, suitable for AMB, DBC, and metallization workflows. What you can specify:

1. Dimensions & Thickness
– Panel or piece size to drawing (rectangular, square, special outline)
– Thickness range: 0.25–0.80 mm commonly used; other values available
– Thickness tolerance achievable: ±0.03 mm for small pieces, ±0.05 mm for full panels

2. Flatness / Warpage Control
– Define max. bow/warp per panel or per individual substrate
– Typical control range: ≤30–50 µm across 100 × 100 mm, measured on the designated datum plane
– Support for high-copper-load AMB/DBC structures to maintain flatness after brazing

3. Edge & Geometry Features
– Chamfered or radiused edges, deburring, fiducial marks, notch or pin marks
– Alignment holes, vent/relief slots, and bevels for stress reduction
– Edge chamfer angle or radius can be specified (e.g., 0.2–0.5 mm)

4. Cutting & Profiling Options
– Laser cutting for outlines, vias, cavities, or narrow slot features
– Singulation strategy: full cut, half-cut, tab routing, or break-out tabs
– Control of the heat-affected zone and micro-crack limits upon request

5. Copper & Metallization (for AMB/DBC Types)
– Copper thickness: for example, 0.3 mm, 0.4 mm, 0.6 mm, or custom
– Copper pattern, isolation gap width, conductor width, and alignment tolerance
– Requests for plated-through vias or via-land preparation can be reviewed

6. Surface Finish Requirements
– Bare ceramic: lapped, fine-ground, or polished; Ra commonly 0.2–0.8 µm
– Copper surface: raw copper, Ni/Au (ENIG type), or Ag finish for bonding or solder paste
– Define coating thickness (e.g., Ni 3–7 µm + Au 0.05–0.1 µm or Ag 5–10 µm)

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A high-strength silicon nitride substrate is an electrically insulating ceramic base used under copper metallization in SiC and IGBT power modules. It is selected when the module needs better thermal-cycling reliability, lower crack risk and stronger mechanical support than conventional alumina or aluminum nitride substrates.

Why Choose Si₃N₄ for Power Module Substrates?

Silicon nitride is selected when a power module substrate must balance thermal transfer, electrical insulation and mechanical reliability. Compared with alumina, Si₃N₄ provides higher thermal conductivity and fracture toughness. Compared with aluminum nitride, it is often selected where thermal cycling, vibration, copper stress and edge cracking are major reliability concerns.

Material Main Advantage Limitation Best-Fit Use
Alumina Cost-effective and widely available Lower thermal conductivity and lower toughness Standard power circuits and cost-sensitive insulation
Aluminum Nitride Very high thermal conductivity More brittle under mechanical or thermal stress Heat-spreading designs with controlled stress
Silicon Nitride High toughness, good thermal conductivity and low CTE Higher cost than alumina SiC/IGBT modules, EV inverters and thermal-cycling assemblies

High Strength Silicon Nitride Substrate Benefits

  • High bending strength resists cracking under reflow and thermal cycling
    Flexural strength above 600 MPa helps reduce substrate cracking risk during soldering and −40 °C to 150 °C cycling. This reduces die attach failures and supports long-term reliability evaluation in power modules.
  • 75–90 W/m·K thermal conductivity enables compact and cooler module design
    Efficient heat transfer lowers junction-to-case resistance and supports high power density layouts. It supports more stable thermal paths in SiC and IGBT devices.
  • Dielectric strength ≥15 kV/mm supports thinner insulation and high-voltage safety
    High insulation capability allows reduced substrate thickness without compromising creepage and clearance. Suitable for 800V EV systems, PV inverters, and industrial drives.
  • Low CTE close to SiC minimizes thermal stress on copper and die interfaces
    With 2.9–3.2 × 10⁻⁶/K, the CTE matches semiconductor and metallization layers. This reduces solder fatigue, delamination, and warpage under rapid heating and cooling.
  • Precise flatness and thickness tolerance enhance metallization and solder bonding
    Tight control of thickness (±0.05–0.10 mm) helps improve copper wetting consistency and brazing quality. It stabilizes thermal performance and helps reduce assembly variation when process conditions are controlled.

High Strength Silicon Nitride Substrate Properties

Si3N4 Type Gas pressure sintering Si3N4 Hot pressing sintering Si3N4 High thermal conductivity Si3N4
Density (g/cm3) 3.2 3.3 3.25
Flexural Strength (MPa) 700 900 600~800
Young Modulus (GPa) 300 300 300~320
Poisson's ratio 0.25 0.28 0.25
Compressive strength (MPa) 2500 3000 2500
Hardness (GPa) 15 16 15
Fracture toughness (MPa*m1/2) 5~7 6~8 6~7
Maximum working temperature (℃) 1100 1300 1100
Thermal conductivity (W/m*K) 20 25 80~100
Thermal expansion coefficient (/℃) 3*10-6 3.1*10-6 3*10-6
Thermal shock resistance (ΔT ℃) 550 800 /

High Strength Silicon Nitride Substrate Specifications

Type 1: Rectangular High Strength Silicon Nitride Substrate

Si3N4 Substrate in EV Inverter Application

Rectangular Silicon Nitride Substrate
Item No. Length(mm) Width (mm) Thickness (mm)
AT-DHG-JB001 10 10 0.32
AT-DHG-JB002 20 20 0.32
AT-DHG-JB003 30 30 4.0 
AT-DHG-JB004 40 40 0.5
AT-DHG-JB005 50 50 0.32
AT-DHG-JB006 50 50 0.635
AT-DHG-JB007 50 50 1.0 
AT-DHG-JB008 50 50 2.0 
AT-DHG-JB009 50 50 4.0 
AT-DHG-JB010 50 50 9.0 
AT-DHG-JB011 100 100 0.32
AT-DHG-JB012 100 100 0.5
AT-DHG-JB013 100 100 0.635
AT-DHG-JB014 100 100 1.0 
AT-DHG-JB015 100 100 4.0 
AT-DHG-JB016 100 100 9.0 
AT-DHG-JB017 114 114 0.32
AT-DHG-JB018 114 114 0.5
AT-DHG-JB019 114 114 0.635
AT-DHG-JB020 114 114 1.0 
AT-DHG-JB021 190 138 0.32
AT-DHG-JB022 190 138 0.5
AT-DHG-JB023 190 138 0.635
AT-DHG-JB024 190 138 1.0 

Type 2: Round High Strength Silicon Nitride Substrate

Metallized Si3N4 Substrate

Round Silicon Nitride Substrate
Item No. Diameter(mm) Thickness (mm)
AT-DHG-JB025 5 0.25
AT-DHG-JB026 5 0.32
AT-DHG-JB027 5 0.625
AT-DHG-JB028 5 1
AT-DHG-JB029 10 0.25
AT-DHG-JB030 10 0.32
AT-DHG-JB031 10 0.625
AT-DHG-JB032 10 1
AT-DHG-JB033 20 0.25
AT-DHG-JB034 20 0.32
AT-DHG-JB035 20 0.625
AT-DHG-JB036 20 1
AT-DHG-JB037 40 0.25
AT-DHG-JB038 40 0.32
AT-DHG-JB039 40 0.625
AT-DHG-JB040 40 1
AT-DHG-JB041 50 0.25
AT-DHG-JB042 50 0.32
AT-DHG-JB043 50 0.625
AT-DHG-JB044 50 1
AT-DHG-JB045 100 0.32
AT-DHG-JB046 100 1
AT-DHG-JB047 100 2
AT-DHG-JB048 150 0.32
AT-DHG-JB049 150 1
AT-DHG-JB050 150 2
AT-DHG-JB051 150 20

AMB/DBC Design Review Checklist

Before quotation, ADCERAX reviews the substrate drawing, copper layout and assembly conditions to reduce warpage, cracking and bonding risk. The following details help our team evaluate whether a standard substrate, custom blank or metallized substrate preparation is more suitable.

Specification What to Provide Why It Matters
Substrate size Length, width, diameter or panel outline Confirms forming, cutting and inspection feasibility
Thickness Ceramic thickness and tolerance Affects insulation, thermal resistance and warpage
Copper layout Copper thickness, symmetry and isolation gap Reduces stress concentration and bonding risk
Flatness target Bow or warpage limit after processing Supports soldering, brazing and module assembly
Edge requirement Chamfer, radius, bevel or deburring Reduces edge chipping during handling
Surface finish Bare, lapped, polished, Ni/Au, Ag or copper-ready Supports solder wetting, wire bonding or metallization
Hole/slot features Position, diameter, tolerance and datum Helps avoid stress concentration and alignment errors

High Strength Silicon Nitride Substrate Packaging

  • Each substrate is sealed in anti-static film
  • Packed in foam-lined hard cartons to prevent breakage

High Strength Silicon Nitride Substrate Packaging

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*All inquiries are confidential.

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customize size

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