ADCERAX® Silicon Carbide Wafer Boat supports wafer handling and high-temperature processing in diffusion, oxidation and annealing furnace environments where stable geometry and thermal consistency are critical. Its SiC structure maintains mechanical rigidity and predictable behavior across extended heating cycles, allowing controlled wafer positioning and reliable gas-flow interaction throughout the process chamber. This performance makes the SiC Wafer Carrier Boat suitable for equipment builders and furnace system integrators seeking dependable loading stability and long operating life under demanding thermal conditions. For broader furnace carrier assemblies, ADCERAX also supports silicon carbide wafer handling furnace components for PV thermal-processing equipment.
Precision Material and Thermal Performance Features of the Silicon Carbide Wafer Boat
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High-Temperature Stability Across Continuous Furnace Cycles
The structure maintains shape under 1400–1500°C thermal exposure, allowing the sintered sic wafer boat to remain dimensionally stable through extended heat cycles.
Its low thermal expansion of 4.0–4.5×10⁻⁶/K supports uniform wafer spacing during long oxidation or diffusion runs without drift.
High flexural strength of 350–430 MPa ensures the carrier endures repeated loading sequences without deformation accumulation. -
Controlled Surface and Slot Geometry for Consistent Wafer Alignment
Surface roughness of Ra 0.2–0.6 μm minimizes friction and reduces particle generation during loading and unloading.
Slot pitch stability within ±0.05–0.10 mm supports accurate wafer placement and repeatable gas-flow interaction during furnace processing.
Straightness maintained at ≤0.05 mm / 100 mm ensures predictable wafer support over the full carrier length. -
Chemical and Atmospheric Compatibility for Furnace Process Requirements
The high purity sic wafer boat remains chemically inert in H₂, N₂, Ar, NH₃, Cl₂, HCl, and SiH₄ atmospheres, supporting clean thermal environments.
Oxidation resistance validated in O₂-based cycles enables stable performance in dry and wet oxidation steps without surface degradation.
Low porosity at <0.1–0.5% reduces absorption and prevents micro-crack development during repeated heating and cooling sequences.
Technical Specifications for Silicon Carbide Wafer Boats
The following values are typical reference ranges for RBSiC and SSiC wafer boat designs. Final specifications should be confirmed according to wafer size, furnace layout, loading weight, process atmosphere and drawing requirements.
| Specification | Typical Reference Range | Buyer Relevance |
|---|---|---|
| Material | RBSiC / SSiC high-density silicon carbide | Determines strength, porosity and thermal-cycle stability. |
| Bulk Density | 3.05–3.17 g/cm³ | Supports stable structure under repeated furnace use. |
| Open Porosity | <0.5% for RBSiC / <0.1% for SSiC | Helps reduce particle entrapment and gas absorption. |
| Flexural Strength | 220–290 MPa for RBSiC / 350–430 MPa for SSiC | Important for loaded wafer stacks and long carrier spans. |
| Thermal Conductivity | 80–120 W/m·K | Helps maintain more balanced thermal behavior. |
| Thermal Expansion | 4.0–4.5×10⁻⁶/K | Helps reduce dimensional drift during heating and cooling. |
| Service Temperature | Grade-dependent, usually reviewed by process | Should be confirmed according to furnace atmosphere and cycle profile. |
| Surface Finish | Drawing-based Ra control | Affects particle risk and wafer contact behavior. |
The final material grade should be selected according to the silicon carbide ceramic structure, furnace atmosphere and loading conditions.
Dimensions of Silicon Carbide Wafer Boat
| Silicon Carbide Wafer Boat | ||
| Item No. | Diameter（mm) | Height (mm) |
| AT-SIC-T1001 | Customize | |
Packaging and Shipment Protection for Silicon Carbide Wafer Boat
Silicon Carbide Wafer Boat units are packed in reinforced multi-layer cartons with internal cushioning to prevent vibration and contact damage during transport. Each carton is further secured with strapping and stacked within a protective wooden frame to stabilize the load throughout long-distance handling. The finished pallets are prepared for international shipping, ensuring safe arrival under standard sea or air-freight conditions.
